The RGA wording (Residual Gas Analysis) refers to the analysis of residual vapors and gases in the chambers under vacuum and to the vacuum process.
This analysis is carried out by measuring the partial pressure of critical constituents to the quality of the vacuum and to the proper functioning of the processes. In particular, this analysis is essential in order to understand the interaction of these species with the growth of thin films deposition. This analysis also enables to identify gases coming from vacuum pumps or from the degassing of surfaces.
We have extensive experience in the integration of RGA mass spectrometers including Pfeiffer (PrismaPlus™ QMG 220) and Inficon (Transpector range).
Together with our know-how in terms of vacuum implementation and vacuum steaming, we ensure to our customers quality residual gas analysis equipment, standard or tailored, based on requirements specifications.
See our RGA150 Residual Gas Analysis System –>
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